High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

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PDF) Towards the Fabrication of High-Aspect-Ratio Silicon Gratings

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PDF) Metal assisted chemical etching for high aspect ratio

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Figure 2 from High aspect ratio deep silicon etching

PDF) Fabrication of high-aspect ratio silicon nanopillars for

PDF) Metal assisted chemical etching for high aspect ratio

Deep reactive ion etching - ScienceDirect

Direct etching results of arrays of vertical silicon (100

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